The Binary-Weighted Inductor Array:

It is well known that inductors and capacitors for operation at microwave frequencies may be realized from short sections of transmission lines (e.g., of length less than one-quarter the operating wavelength) [11]. Thus, a tunable inductor may be obtained by interconnecting, preferably via MEMS switches, network unit inductor cells so that the overall network exhibits a certain inductance. Such is the idea behind the binary-weighted inductor array [10] shown.

novel rf mems  Inductors

For example, in order to obtain an inductance value of L21, switches S1, S2, and S3 would be closed, and switches S4, S5, S6, S7, S8, S9, S10, S11, and S12 would be open. On the other hand, if switches with an inductance of value 2L1 + 2L2 were desired, then switches S1, S3, S4, S5, S7, S10, and S9 would be closed, while switches S2, S6, S11, and S12 would be open.

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